Low Temperature Deposition of SiNx Thin Films by the LPCVD...

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Croatica Chemica Acta 2012

Low Temperature Deposition of SiNx Thin Films by the LPCVD Method

Tijanić, Zdenko, Ristić, Davor, Ivanda, Mile, Bogdanović-Radović, Ivančica, Marciuš, Marijan, Ristić, Mira, Gamulin, Ozren, Musić, Svetozar, Furić, Krešimir, Chiasera, Alesandro, Ferrari, Maurizio, Ri
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Year:
2012
Language:
english
Journal:
Croatica Chemica Acta
DOI:
10.5562/cca1970
File:
PDF, 2.97 MB
english, 2012
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