High-k Nanomixed Hf[sub x]Al[sub y]O[sub z] Film Capacitors...

Electrochemical and Solid-State Letters 2005 Vol. 8; Iss. 10

High-k Nanomixed Hf[sub x]Al[sub y]O[sub z] Film Capacitors Grown on Ru Metal Electrodes by Atomic Layer Deposition

Seong, Nak-Jin, Yoon, Soon-Gil, Yeom, Seung-Jin, Woo, Hyun-Kyung, Kil, Deok-Sin, Roh, Jae-Sung, Sohn, Hyun-Chul
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Volume:
8
Year:
2005
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2017925
File:
PDF, 567 KB
english, 2005
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