Ultrathin nano-sized Al2O3 strips on the surface of por-Si

Materials Science in Semiconductor Processing 2015 / 11 Vol. 39

Ultrathin nano-sized Al2O3 strips on the surface of por-Si

Seredin, P.V., Lenshin, A.S., Kashkarov, V.M., Lukin, A.N., Arsentiev, I.N., Bondarev, A.D., Tarasov, I.S.
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Volume:
39
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2015.05.067
Date:
November, 2015
File:
PDF, 1.30 MB
english, 2015
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