Film bulk acoustic resonators integrated on arbitrary...

Scientific Reports 2015 / 3 Vol. 5

Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer

Chen, Guohao, Zhao, Xinru, Wang, Xiaozhi, Jin, Hao, Li, Shijian, Dong, Shurong, Flewitt, A. J., Milne, W. I., Luo, J. K.
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Volume:
5
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/srep09510
Date:
March, 2015
File:
PDF, 1.39 MB
english, 2015
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