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Three-dimensional surface figure measurement of high-accuracy spherical mirror with nanoprofiler using normal vector tracing method
Kudo, R., Okuda, K., Usuki, K., Nakano, M., Yamamura, K., Endo, K.Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4869473
Date:
April, 2014
File:
PDF, 941 KB
english, 2014