Monte Carlo Simulation of Thin Film Growth with Defect Formation: Application to Via Filling
Kaneko, Yutaka, Hiwatari, Yasuaki, Ohara, KatsuhikoVolume:
30
Language:
english
Journal:
Molecular Simulation
DOI:
10.1080/08927020410001709316
Date:
November, 2004
File:
PDF, 102 KB
english, 2004