Fabrication of Pb(Zr, Ti)O 3 Thin Films by Liquid Source...

Integrated Ferroelectrics 2003 / 6 Vol. 53; Iss. 1

Fabrication of Pb(Zr, Ti)O 3 Thin Films by Liquid Source Misted Chemical Deposition Method Equipped with a Mist-Droplet Size Controller

Kawasaki, Susumu, Motoyama, Shin-Ichi, Tatsuta, Toshiaki, Tsuji, Osamu, Shiosaki, Tadashi
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Volume:
53
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580390258200
Date:
June, 2003
File:
PDF, 356 KB
english, 2003
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