Guest Editorial Equipment and Operations Automation in the...

IEEE Transactions on Automation Science and Engineering 2011 / 01 Vol. 8; Iss. 1

Guest Editorial Equipment and Operations Automation in the Semiconductor Industry

Morrison, James R., Chien, Chen-Fu, Dauzère-Pérès, Stépha, Dawande, Milind, Ding, Han, Pettinato, Jeffrey S., Yi, Jingang
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Volume:
8
Language:
english
Journal:
IEEE Transactions on Automation Science and Engineering
DOI:
10.1109/tase.2010.2078870
Date:
January, 2011
File:
PDF, 1.04 MB
english, 2011
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