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SPIE Proceedings [SPIE 29th European Mask and Lithography Conference - Dresden, Germany (Tuesday 25 June 2013)] 29th European Mask and Lithography Conference - Thermal probe nanolithography: in-situ inspection, high-speed, high-resolution, 3D
Holzner, Felix, Paul, Philip, Despont, Michel, Cheong, Lin Lee, Hedrick, James, Dürig, Urs, Knoll, Armin, Behringer, Uwe F. W., Maurer, WilhelmVolume:
8886
Year:
2013
Language:
english
DOI:
10.1117/12.2032318
File:
PDF, 756 KB
english, 2013