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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 7 February 2015)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - On the transmission of sub-wavelength annular apertures based on periodic structure
Roth, Stephan, Nakata, Yoshiki, Neuenschwander, Beat, Xu, Xianfan, Chen, Kuan-Ming, Chung, Ming-Han, Weng, Chun-Hung, Lee, Chih-KungVolume:
9350
Year:
2015
Language:
english
DOI:
10.1117/12.2078079
File:
PDF, 1.11 MB
english, 2015