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A New Approach to Reducing Line-Edge Roughness by Using a Cross-Linked Positive-Tone Resist
Yamaguchi, Toru, Namatsu, Hideo, Nagase, Masao, Yamazaki, Kenji, Kurihara, KenjiVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.38.7114
Date:
December, 1999
File:
PDF, 1.31 MB
english, 1999