Influence of Excitation Frequency on the Electron Distribution Function in Capacitively Coupled Discharges in Argon and Helium
Abdel-Fattah, Essam, Sugai, HideoVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.42.6569
Date:
October, 2003
File:
PDF, 331 KB
english, 2003