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Chemical Vapor Deposited RuO[sub x] Films
Ganesan, P. Gopal, Eizenberg, M., Dornfest, C.Volume:
149
Year:
2002
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1495910
File:
PDF, 1.52 MB
english, 2002