[ECS 209th ECS Meeting - Denver, Colorado (May 7-May 12, 2006)] ECS Transactions - Liquid delivery MOCVD of Ruthenium Films from Ru(EtCp)2 with Toluene Solvent
Lisker, Marco, Hur'yeva, Tetyana, Burte, EdmundVolume:
2
Year:
2007
Language:
english
DOI:
10.1149/1.2408903
File:
PDF, 728 KB
english, 2007