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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Magnetic Abrasive Finishing Using Nano-size Diamond Dispersed Co-Ni Electroless Plated Plastic Balls and its Application to Post CMP Process
Yoshihara, Sachio, Hanzawa, Keiko, Shirakashi, TakashiVolume:
3
Year:
2007
Language:
english
DOI:
10.1149/1.2753268
File:
PDF, 1.17 MB
english, 2007