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[ECS 2007 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT) - Barga, Italy (July 28 - August 3, 2007)] ECS Transactions - Atomic-Scale Analyses of Non-Equilibrium Surface Reactions During Plasma Processing
Hamaguchi, Satoshi, Yamashiro, Masashi, Yamada, HideakiVolume:
8
Year:
2007
Language:
english
DOI:
10.1149/1.2767306
File:
PDF, 165 KB
english, 2007