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[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Enhanced Cracking Resistance of Plasma Deposited Low-k SiCOH Films with Nano Imbedded Layers Insertion
Nguyen, Son V., Liniger, E., Ida, K., Herbst, B., Malone, K., Klymko, N., Cohen, S., Simonyi, E., Dziobkowski, C., Lane, S., Grill, A., Restaino, D., Gates, S., Edelstein, D., Nogami, T., Ivers, T.Volume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2790404
File:
PDF, 368 KB
english, 2007