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Role of Hydrogen Peroxide in Alkaline Slurry on the Polishing Rate of Polycrystalline Ge[sub 2]Sb[sub 2]Te[sub 5] Film in Chemical Mechanical Polishing
Cho, Jong-Young, Cui, Hao, Park, Jin-Hyung, Yi, Sok-Ho, Park, Jea-GunVolume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3329543
File:
PDF, 398 KB
english, 2010