Three-dimensional nanoimprint lithography using...

Plastics Rubber and Composites 2010 / 09 Vol. 39; Iss. 7

Three-dimensional nanoimprint lithography using photocurable resins

Taniguchi, J., Unno, N., Kamiya, Y., Sakai, N., Ohsaki, T.
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Volume:
39
Language:
english
Journal:
Plastics, Rubber and Composites
DOI:
10.1179/174328910x12691245470473
Date:
September, 2010
File:
PDF, 587 KB
english, 2010
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