Implementation of the CMOS MEMS Condenser Microphone with...

Sensors 2011 / 06 Vol. 11; Iss. 12

Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate

Huang, Chien-Hsin, Lee, Chien-Hsing, Hsieh, Tsung-Min, Tsao, Li-Chi, Wu, Shaoyi, Liou, Jhyy-Cheng, Wang, Ming-Yi, Chen, Li-Che, Yip, Ming-Chuen, Fang, Weileun
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Volume:
11
Language:
english
Journal:
Sensors
DOI:
10.3390/s110606257
Date:
June, 2011
File:
PDF, 1.22 MB
english, 2011
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