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A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process
Merdassi, Adel, Yang, Peng, Chodavarapu, VamsyVolume:
15
Language:
english
Journal:
Sensors
DOI:
10.3390/s150407349
Date:
March, 2015
File:
PDF, 1.73 MB
english, 2015