Capacitive Micro Pressure Sensor Integrated with a Ring...

Sensors 2009 / 12 Vol. 9; Iss. 12

Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip

Dai, Ching-Liang, Lu, Po-Wei, Chang, Chienliu, Liu, Cheng-Yang
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Volume:
9
Language:
english
Journal:
Sensors
DOI:
10.3390/s91210158
Date:
December, 2009
File:
PDF, 486 KB
english, 2009
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