A Novel Nanogap Fabrication Technique Using Taguchi Method...

A Novel Nanogap Fabrication Technique Using Taguchi Method and Modified Particle Swarm Optimization

Li, Te Sheng, Chen, Ling Hui
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Volume:
236-237
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/amm.236-237.118
Date:
November, 2012
File:
PDF, 284 KB
english, 2012
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