Modelling of Polishing Tools for High Spatial Frequency...

Key Engineering Materials 2013 / 6 Vol. 554-557

Modelling of Polishing Tools for High Spatial Frequency Defect Correction on Aspherical Surfaces

Goupil, Antoine, Iordanoff, Ivan, Charles, Jean Luc, Rinchet, André
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Volume:
554-557
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.554-557.1232
Date:
June, 2013
File:
PDF, 888 KB
english, 2013
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