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Use of Graphite Cap to Reduce Unwanted Post-Implantation Annealing Effects in SiC
Oliviero, Erwan, Lazar, Mihaï, Vang, Heu, Dubois, Christiane, Cremillieu, Pierre, Leclercq, Jean Louis, Dazord, Jacques, Planson, DominiqueVolume:
556-557
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.556-557.611
File:
PDF, 731 KB
english, 2007