Thermal Decomposition of Silicon-rich Oxides Deposited by...

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Croatica Chemica Acta 2012

Thermal Decomposition of Silicon-rich Oxides Deposited by the LPCVD Method

Ristić, Davor, Ivanda, Mile, Furić, Krešimir, Chiasera, Alessandro, Moser, Enrico, Ferrari, Maurizio
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Year:
2012
Language:
english
Journal:
Croatica Chemica Acta
DOI:
10.5562/cca1969
File:
PDF, 4.06 MB
english, 2012
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