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Electrical and Mechanical Characterization of Doped and Annealed Polycrystalline 3C-SiC Thin Films
Roper, Christopher S., Radmilovic, Velimir, Howe, Roger T., Maboudian, RoyaVolume:
156
Year:
2009
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3000002
File:
PDF, 623 KB
english, 2009