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Hyperthermal neutral beam sources for material processing (invited)
Yoo, S. J., Kim, D. C., Joung, M., Kim, J. S., Lee, B. J., Oh, K. S., Kim, K. U., Kim, Y. H., Kim, Y. W., Choi, S. W., Son, H. J., Park, Y. C., Jang, J.-N., Hong, M. P.Volume:
79
Year:
2008
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2801343
File:
PDF, 731 KB
english, 2008