A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor
Lee, Junwoo, Choi, Wook, Yoo, Yong, Hwang, Kyo, Lee, Sang-Myung, Kang, Sungchul, Kim, Jinseok, Lee, JeongVolume:
14
Language:
english
Journal:
Sensors
DOI:
10.3390/s141222199
Date:
November, 2014
File:
PDF, 3.18 MB
english, 2014