In situ plasma diagnostics study by means of optical...

In situ plasma diagnostics study by means of optical emission spectroscopy for diamond chemical vapor deposition under high gravity conditions

Tappero, Fabrizio, Abe, Yoshiyuki, Maizza, Giovanni
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Volume:
74
Year:
2003
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1610783
File:
PDF, 544 KB
english, 2003
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