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In situ plasma diagnostics study by means of optical emission spectroscopy for diamond chemical vapor deposition under high gravity conditions
Tappero, Fabrizio, Abe, Yoshiyuki, Maizza, GiovanniVolume:
74
Year:
2003
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1610783
File:
PDF, 544 KB
english, 2003