Self-consistent circuit model for plasma source ion...

Review of Scientific Instruments 2008 Vol. 79; Iss. 2

Self-consistent circuit model for plasma source ion implantation

Chung, Kyoung-Jae, Jung, Soon-Wook, Choe, Jae-Myung, Kim, Gon-Ho, Hwang, Y. S.
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Volume:
79
Year:
2008
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2816792
File:
PDF, 260 KB
english, 2008
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