The study of new vacuum pressure measurement technique...

Review of Scientific Instruments 2011 Vol. 82; Iss. 7

The study of new vacuum pressure measurement technique using ultrasonic acoustic impedance transducers

Hong, S. S., Khan, Wakil, Shin, Y. H., Cho, S. H., Ahn, B. Y., Chung, J. W., Woo, S. Y.
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Volume:
82
Year:
2011
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3615310
File:
PDF, 355 KB
english, 2011
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