Expanded beam deflection method for simultaneous...

Expanded beam deflection method for simultaneous measurement of displacement and vibrations of multiple microcantilevers

Nieradka, K., Małozięć, G., Kopiec, D., Grabiec, P., Janus, P., Sierakowski, A., Gotszalk, T.
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Volume:
82
Year:
2011
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3652977
File:
PDF, 1.49 MB
english, 2011
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