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Expanded beam deflection method for simultaneous measurement of displacement and vibrations of multiple microcantilevers
Nieradka, K., Małozięć, G., Kopiec, D., Grabiec, P., Janus, P., Sierakowski, A., Gotszalk, T.Volume:
82
Year:
2011
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3652977
File:
PDF, 1.49 MB
english, 2011