Equivalent circuit effects on mode transitions in H2...

Physics of Plasmas 2015 / 04 Vol. 22; Iss. 4

Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas

Xu, Hui-Jing, Zhao, Shu-Xia, Zhang, Yu-Ru, Gao, Fei, Li, Xue-Chun, Wang, You-Nian
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Volume:
22
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4917335
Date:
April, 2015
File:
PDF, 3.25 MB
english, 2015
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