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ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Atomic Layer Deposition of Antimony Telluride Thin Films Using (Me
Gu, Diefeng, Nminibapiel, David, Baumgart, Helmut, Robinson, Hans, Kochergin, VladimirYear:
2011
Language:
english
DOI:
10.1149/1.3633675
File:
PDF, 1.18 MB
english, 2011