Batch Mode Microultrasonic Machining ( $\boldsymbol \mu $...

Batch Mode Microultrasonic Machining ( $\boldsymbol \mu $ USM) Using Workpiece Vibration

Viswanath, Anupam, Li, Tao, Gianchandani, Yogesh
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2014.2364261
Date:
February, 2015
File:
PDF, 943 KB
english, 2015
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