Demonstration of 1 Million $Q$ -Factor on Microglassblown...

Journal of Microelectromechanical Systems 2015 / 2 Vol. 24; Iss. 1

Demonstration of 1 Million $Q$ -Factor on Microglassblown Wineglass Resonators With Out-of-Plane Electrostatic Transduction

Senkal, Doruk, Ahamed, Mohammed J., Ardakani, Mohammad H. Asadian, Askari, Sina, Shkel, Andrei M.
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2014.2365113
Date:
February, 2015
File:
PDF, 4.96 MB
english, 2015
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