Numerical Simulation of GaN Growth in a Metalorganic...

Journal of Manufacturing Science and Engineering 2013 / 11 Vol. 135; Iss. 6

Numerical Simulation of GaN Growth in a Metalorganic Chemical Vapor Deposition Process

Meng, Jiandong, Jaluria, Yogesh
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Volume:
135
Language:
english
Journal:
Journal of Manufacturing Science and Engineering
DOI:
10.1115/1.4025781
Date:
November, 2013
File:
PDF, 5.97 MB
english, 2013
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