Quasidynamic calibration of stroboscopic scanning white light interferometer with a transfer standard
Seppä, Jeremias, Kassamakov, Ivan, Heikkinen, Ville, Nolvi, Anton, Paulin, Tor, Lassila, Antti, Hæggström, EdwardVolume:
52
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.oe.52.12.124104
Date:
December, 2013
File:
PDF, 491 KB
english, 2013