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Reversible and irreversible effects after oxygen exposure in thick (>1 μm) silicon films deposited by VHF-PECVD on glass substrates investigated by dual beam photoconductivity 1
Yilmaz, Gökhan, Cansever, Hamza, Sagban, H. Muzaffer, Günes, Mehmet, Smirnov, Vladimir, Finger, Friedhelm, Brüggemann, RudiVolume:
92
Journal:
Canadian Journal of Physics
DOI:
10.1139/cjp-2013-0638
Date:
July, 2014
File:
PDF, 558 KB
2014