(Invited) PMD and STI Gap-Fill Challenges for Advanced...

ECS Transactions 2013 / 03 Vol. 52; Iss. 1

(Invited) PMD and STI Gap-Fill Challenges for Advanced Technology of Logic and eNVM

Liu, H., Srivathanakul, S., Liu, H.-W., Gaan, S., Cai, X., Rao, X., Shu, J., Kim, S.
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Volume:
52
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05201.0397ecst
Date:
March, 2013
File:
PDF, 412 KB
english, 2013
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