Oxidation Dependence on Defect Density in 3C-SiC Films

Eickhoff, M., Vouroutzis, N., Nielsen, A., Krötz, G., Stoemenos, J.

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Volume:

148

Year:

2001

Language:

english

Journal:

Journal of The Electrochemical Society

DOI:

10.1149/1.1370972

File:

PDF, 1.83 MB

english, 2001

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