Computer Simulation for Morphology, Size, and Density of Oxide Precipitates in CZ Silicon
Sueoka, Koji, Akatsuka, Masanori, Okui, Masahiko, Katahama, HisashiVolume:
150
Year:
2003
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1588301
File:
PDF, 155 KB
english, 2003