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Effect of Polish By-Products on Copper Chemical Mechanical Polishing Behavior
Han, Ja-Hyung, Hah, Sang-Rok, Kang, Young-Jae, Park, Jin-GooVolume:
154
Year:
2007
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2721771
File:
PDF, 660 KB
english, 2007