[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Scaling Down of MOCVD HfSiON to 1nm EOT
Shi, Xiaoping, Rothschild, Aude, Everaert, Jean L., Van Elshocht, Sven, Date, Lucien, Schreutelkamp, Robert, Schaekers, MarcVolume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779544
File:
PDF, 564 KB
english, 2007