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[ECS 23rd Symposium on Microelectronics Technology and Devices - Gramado, Brazil (September 1 - September 4, 2008)] ECS Transactions - Simulation and Fabrication of Suspended-Membrane Resistive Microbolometers Using Gold-Black as Absorber
Della Lucia, Felipe L., Swart, Jacobus W., Zoccal, Leonardo B., Diniz, José A., Doi, Ioshiaki, Frateschi, Newton C.Volume:
14
Year:
2008
Language:
english
DOI:
10.1149/1.2956021
File:
PDF, 702 KB
english, 2008