ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - From 2-Dimensional Lithography To 3-Dimensional Structures
Van Zeijl, Henk, Wei, Jia, Shen, Chenggang, Verhaar, Theo M., Maury, Pascale, Sarro, Lina M.Year:
2010
Language:
english
DOI:
10.1149/1.3360654
File:
PDF, 2.56 MB
english, 2010