ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - Novel Diamond Disc Diagnostic Method Based on 'Dry' Coefficient of Friction Measurements
Sampurno, Yasa, Sudargho, Fransisca, Meled, Anand, Zhuang, Yun, Philipossian, AraYear:
2010
Language:
english
DOI:
10.1149/1.3360688
File:
PDF, 326 KB
english, 2010