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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Single Ion Implantation into Si-Based Devices
Johnson, Brett C., Tettamanzi, Giuseppe, Yang, Changyi, Alves, Andew, Van Donkelaar, Jessica, Thompson, Samuel, Verduijn, Arjan, Mol, Jan A., Wacquez, Romain, Vinet, Maud, Dzurak, Andrew, Sanquer, M.,Year:
2010
Language:
english
DOI:
10.1149/1.3485692
File:
PDF, 3.59 MB
english, 2010