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A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
Khir, Mohd Haris Md, Qu, Peng, Qu, HongweiVolume:
11
Language:
english
Journal:
Sensors
DOI:
10.3390/s110807892
Date:
August, 2011
File:
PDF, 1.99 MB
english, 2011